Concept information
Preferred term
لایه مقاوم به الکترون
Type
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
Broader concept
Scope note
- لایه مقاوم به باریکه الکترون
In other languages
-
English
-
electron beam resist
URI
http://www.irandoc.acir/onto/irandoc/insp0002889
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