Concept information
Preferred term
Film deposition
Type
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
Broader concept
Narrower concepts
type
In other languages
-
Persian
URI
http://www.irandoc.acir/onto/irandoc/778678c1-03d6-402a-a039-4eaaeb999399
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