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Concept information

Sample preparation > Film deposition > Physical deposition > Physical vapor deposition

Preferred term

Physical vapor deposition  

Type

  • http://www.irandoc.ac.ir/onto/irandoc-meta/Concept

Broader concept

Entry terms

  • PVD

In other languages

URI

http://www.irandoc.acir/onto/irandoc/9bf06d71-942b-47ec-872c-0ddcec3e4c00

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