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Concept information

Ion beam application > Focused ion beam technology
Focusing > Particle beam focusing > Focused ion beam technology
Beam handling technique > Particle beam focusing > Focused ion beam technology
Technology > Focused ion beam technology

Preferred term

Focused ion beam technology  

Type

  • http://www.irandoc.ac.ir/onto/irandoc-meta/Concept

Entry terms

  • focused ion beam etching

Scope note

  • focused ion beam etching

URI

http://www.irandoc.acir/onto/irandoc/insp0001506

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