Concept information
Preferred term
Sputter etching
Type
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
Broader concept
Entry terms
- rie
Scope note
- rie
In other languages
-
Persian
-
آر.آی.ای
URI
http://www.irandoc.acir/onto/irandoc/insp0001669
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