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Concept information

Vapour deposition > Chemical vapour deposition > Metalorganic chemical vapour deposition

Preferred term

Metalorganic chemical vapour deposition  

Type

  • http://www.irandoc.ac.ir/onto/irandoc-meta/Concept

Entry terms

  • omvpe

URI

http://www.irandoc.acir/onto/irandoc/insp000370

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