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Physics

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Concept information

Coating technique > Epitaxial growth > Vapour phase epitaxial growth > Atomic layer epitaxial growth
Crystal growth > Epitaxial growth > Vapour phase epitaxial growth > Atomic layer epitaxial growth
Vapour deposition > Crystal growth from vapour > Vapour phase epitaxial growth > Atomic layer epitaxial growth
Crystal growth > Crystal growth from vapour > Vapour phase epitaxial growth > Atomic layer epitaxial growth
Vapour deposition > Atomic layer deposition > Atomic layer epitaxial growth

Preferred term

Atomic layer epitaxial growth  

Type

  • http://www.irandoc.ac.ir/onto/irandoc-meta/Concept

Broader concept

Related concepts

Entry terms

  • molecular layer epitaxial growth

Scope note

  • molecular layer epitaxial growth

In other languages

URI

http://www.irandoc.acir/onto/irandoc/insp000373

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