Concept information
Preferred term
Immersion lithography
Type
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
Broader concept
In other languages
-
Persian
URI
http://www.irandoc.acir/onto/irandoc/insp0008847
{{label}}
{{#each values }} {{! loop through ConceptPropertyValue objects }}
{{#if prefLabel }}
{{/if}}
{{/each}}
{{#if notation }}{{ notation }} {{/if}}{{ prefLabel }}
{{#ifDifferentLabelLang lang }} ({{ lang }}){{/ifDifferentLabelLang}}
{{#if vocabName }}
{{ vocabName }}
{{/if}}