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Concept information

Ion beam application > Ion beam assisted deposition
Vapour deposition > Ion beam assisted deposition

Preferred term

Ion beam assisted deposition  

Type

  • http://www.irandoc.ac.ir/onto/irandoc-meta/Concept

Entry terms

  • ibad

In other languages

URI

http://www.irandoc.acir/onto/irandoc/insp0009151

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