@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

<http://www.irandoc.acir/onto/irandoc/insp0008852>
  skos:prefLabel "X-ray lithography"@en, "سنگ‌نگاری پرتو ایکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001529>
  skos:narrower <http://www.irandoc.acir/onto/irandoc/insp0001521>, <http://www.irandoc.acir/onto/irandoc/insp0001519>, <http://www.irandoc.acir/onto/irandoc/insp0001555>, <http://www.irandoc.acir/onto/irandoc/insp0001526>, <http://www.irandoc.acir/onto/irandoc/insp0001556>, <http://www.irandoc.acir/onto/irandoc/insp0001563>, <http://www.irandoc.acir/onto/irandoc/insp0001520>, <http://www.irandoc.acir/onto/irandoc/insp0001518> ;
  skos:prefLabel "فناوری مدار مجتمع"@fa, "Integrated circuit technology"@en ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0009981>, <http://www.irandoc.acir/onto/irandoc/insp0010355>, <http://www.irandoc.acir/onto/irandoc/insp0006306>, <http://www.irandoc.acir/onto/irandoc/insp0010537>, <http://www.irandoc.acir/onto/irandoc/insp0008856>, <http://www.irandoc.acir/onto/irandoc/insp0005557>, <http://www.irandoc.acir/onto/irandoc/insp0003876>, <http://www.irandoc.acir/onto/irandoc/insp0004721>, <http://www.irandoc.acir/onto/irandoc/insp0004718>, <http://www.irandoc.acir/onto/irandoc/insp0009152>, <http://www.irandoc.acir/onto/irandoc/insp0001565>, <http://www.irandoc.acir/onto/irandoc/insp0009257>, <http://www.irandoc.acir/onto/irandoc/insp0008853>, <http://www.irandoc.acir/onto/irandoc/insp000314>, <http://www.irandoc.acir/onto/irandoc/insp0014578>, <http://www.irandoc.acir/onto/irandoc/insp0006315>, <http://www.irandoc.acir/onto/irandoc/insp0012263>, <http://www.irandoc.acir/onto/irandoc/insp0001506>, <http://www.irandoc.acir/onto/irandoc/insp0001786>, <http://www.irandoc.acir/onto/irandoc/insp0006381>, <http://www.irandoc.acir/onto/irandoc/insp0014304>, <http://www.irandoc.acir/onto/irandoc/insp0006589>, <http://www.irandoc.acir/onto/irandoc/insp0002891>, <http://www.irandoc.acir/onto/irandoc/insp0009247>, <http://www.irandoc.acir/onto/irandoc/insp0008844>, <http://www.irandoc.acir/onto/irandoc/insp0005472>, <http://www.irandoc.acir/onto/irandoc/insp0008852>, <http://www.irandoc.acir/onto/irandoc/insp0001566>, <http://www.irandoc.acir/onto/irandoc/insp0003527>, <http://www.irandoc.acir/onto/irandoc/insp0006604>, <http://www.irandoc.acir/onto/irandoc/insp0010199>, <http://www.irandoc.acir/onto/irandoc/insp0008849>, <http://www.irandoc.acir/onto/irandoc/insp0014269>, <http://www.irandoc.acir/onto/irandoc/insp0005531>, <http://www.irandoc.acir/onto/irandoc/insp0010664>, <http://www.irandoc.acir/onto/irandoc/insp0002890>, <http://www.irandoc.acir/onto/irandoc/insp0001673>, <http://www.irandoc.acir/onto/irandoc/insp0003811>, <http://www.irandoc.acir/onto/irandoc/insp0003528>, <http://www.irandoc.acir/onto/irandoc/insp0008107>, <http://www.irandoc.acir/onto/irandoc/insp0013767>, <http://www.irandoc.acir/onto/irandoc/insp0010211>, <http://www.irandoc.acir/onto/irandoc/insp0005132>, <http://www.irandoc.acir/onto/irandoc/insp0009212>, <http://www.irandoc.acir/onto/irandoc/insp0006439>, <http://www.irandoc.acir/onto/irandoc/insp0002889>, <http://www.irandoc.acir/onto/irandoc/insp0006378>, <http://www.irandoc.acir/onto/irandoc/insp0004817> ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001574> .

<http://www.irandoc.acir/onto/irandoc/insp0004721>
  skos:prefLabel "Tape automated bonding"@en, "پیوند خودکار نوار"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0002891>
  skos:prefLabel "Resist"@en, "لایه مقاوم"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0006439>
  skos:prefLabel "Integrated circuit modelling"@en, "مدل‌سازی مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0014269>
  skos:prefLabel "Cluster tools"@en, "ابزار خوشه‌ای"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0002889>
  skos:prefLabel "Electron resist"@en, "لایه مقاوم به الکترون"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0010537>
  skos:prefLabel "Flip-chip device"@en, "افزار فلیپ-تراشه"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0008844>
  skos:prefLabel "Electron beam lithography"@en, "سنگ‌نگاری با باریکه الکترون"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0009152>
  skos:prefLabel "Ion beam lithography"@en, "سنگ‌نگاری با باریکه یونی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0003527>
  skos:prefLabel "Integrated circuit yield"@en, "بهره مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0010211>
  skos:prefLabel "Rapid thermal processing"@en, "فرایند گرمایی سریع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0010199>
  skos:prefLabel "Rapid thermal annealing"@en, "تابکاری گرمایی سریع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001556>
  skos:prefLabel "Isolation technology"@en, "فناوری جداسازی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0006604>
  skos:prefLabel "Metallization"@en, "روکش فلزی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0002890>
  skos:prefLabel "Photoresist"@en, "لایه مقاوم به نور"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0006381>
  skos:prefLabel "Molecular electronics"@en, "الکترونیک مولکولی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0008849>
  skos:prefLabel "Ultraviolet lithography"@en, "سنگ‌نگاری فرابنفش"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0009257>
  skos:prefLabel "Optical interconnection"@en, "اتصال داخلی نوری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0010664>
  skos:prefLabel "High-k dielectric thin film"@en, "لایه نازک دی‌الکتریکی کا-زیاد"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0004718>
  skos:prefLabel "Multichip modules"@en, "مدول چندتراشه‌ای"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001563>
  skos:prefLabel "Semiconductor process modelling"@en, "مدل‌سازی فرایند نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp000314>
  skos:prefLabel "Very large scale integration"@en, "یکپارچه‌سازی در مقیاس خیلی بزرگ"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0008856>
  skos:prefLabel "Lithography"@en, "سنگ‌نگاری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0012263>
  skos:prefLabel "Electrostatic discharge"@en, "تخلیه ایستابرقی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0013767>
  skos:prefLabel "اس.پی.آی.سی.ای"@fa, "Spice"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001555>
  skos:prefLabel "Clean room"@en, "اتاق تمیز"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0004817>
  skos:prefLabel "Integrated optoelectronics"@en, "نورالکترونیک مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001521>
  skos:prefLabel "Integrated circuit metallization"@en, "فلزپوشانی مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0006378>
  skos:prefLabel "Biomolecular electronics"@en, "الکترونیک زیست‌مولکولی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001506>
  skos:prefLabel "Focused ion beam technology"@en, "فناوری باریکه یونی کانونی‌شده"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001519>
  skos:prefLabel "Integrated circuit interconnection"@en, "اتصال داخلی مدار مجمتع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0005132>
  skos:prefLabel "Integrated circuit noise"@en, "نوفه مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0005531>
  skos:prefLabel "Three-dimensional integrated circuit"@en, "مدار مجتمع سه‌بعدی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001526>
  skos:prefLabel "Integrated circuit packaging"@en, "بسته‌بندی مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0003811>
  skos:prefLabel "Lead bonding"@en, "پیوندزنی سربی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0005557>
  skos:prefLabel "Integrated circuit"@en, "مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0005472>
  skos:prefLabel "Bimos integrated circuit"@en, "مدار مجتمع بی.ماس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001520>
  skos:prefLabel "Integrated circuit measurement"@en, "اندازه‌گیری مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0014304>
  skos:prefLabel "Integrated circuit design"@en, "طراحی مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0010355>
  skos:prefLabel "Getter"@en, "گازربا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001574>
  skos:prefLabel "Technology"@en, "فناوری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0008107>
  skos:prefLabel "Reticles"@en, "رتیکول"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001518>
  skos:prefLabel "Integrated circuit bonding"@en, "پیوندزنی مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0014578>
  skos:prefLabel "Beam-lead device"@en, "وسیله سربی-باریکه"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0009981>
  skos:prefLabel "Semiconductor industry"@en, "صنعت نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0009247>
  skos:prefLabel "Simox"@en, "سیماکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0006315>
  skos:prefLabel "Nanotechnology"@en, "نانوفناوری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001566>
  skos:prefLabel "Surface mount technology"@en, "فناوری نصب سطحی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0006589>
  skos:prefLabel "Micromechanical device"@en, "افزار ریزمکانیکی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001786>
  skos:prefLabel "Substrate"@en, "بستر"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001673>
  skos:prefLabel "Chemical mechanical polishing"@en, "پرداخت مکانیکی شیمیایی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0008853>
  skos:prefLabel "Photolithography"@en, "سنگ‌نگاری نوری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0001565>
  skos:prefLabel "Semiconductor technology"@en, "فناوری نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0009212>
  skos:prefLabel "Buried layer"@en, "لایه مدفون"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0003876>
  skos:prefLabel "Micromachining"@en, "ریزماشین‌کاری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0006306>
  skos:prefLabel "Nanoelectronics"@en, "نانوالکترونیک"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .

<http://www.irandoc.acir/onto/irandoc/insp0003528>
  skos:prefLabel "Integrated circuit manufacture"@en, "ساخت مدار یکپارچه"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001529> .