@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

<http://www.irandoc.acir/onto/irandoc/insp0014384>
  skos:prefLabel "Nitridation"@en, "نیتریداسیون"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0008852>
  skos:prefLabel "X-ray lithography"@en, "سنگ‌نگاری پرتو ایکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001557>
  skos:prefLabel "Semiconductor device breakdown"@en, "فروشکست افزار نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001529>
  skos:prefLabel "Integrated circuit technology"@en, "فناوری مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0002891>
  skos:prefLabel "Resist"@en, "لایه مقاوم"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0014269>
  skos:prefLabel "Cluster tools"@en, "ابزار خوشه‌ای"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0002889>
  skos:prefLabel "Electron resist"@en, "لایه مقاوم به الکترون"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001564>
  skos:prefLabel "Wafer bonding"@en, "پیوندزنی ویفری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0008844>
  skos:prefLabel "Electron beam lithography"@en, "سنگ‌نگاری با باریکه الکترون"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0009152>
  skos:prefLabel "Ion beam lithography"@en, "سنگ‌نگاری با باریکه یونی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0003527>
  skos:prefLabel "Integrated circuit yield"@en, "بهره مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0010211>
  skos:prefLabel "Rapid thermal processing"@en, "فرایند گرمایی سریع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0013322>
  skos:prefLabel "Surface contamination"@en, "آلایش سطحی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0010199>
  skos:prefLabel "Rapid thermal annealing"@en, "تابکاری گرمایی سریع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001556>
  skos:prefLabel "Isolation technology"@en, "فناوری جداسازی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0006604>
  skos:prefLabel "Metallization"@en, "روکش فلزی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0002890>
  skos:prefLabel "Photoresist"@en, "لایه مقاوم به نور"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001563>
  skos:prefLabel "Semiconductor process modelling"@en, "مدل‌سازی فرایند نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0002982>
  skos:prefLabel "Zone refining"@en, "پالایش پرگنه‌ای"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0008109>
  skos:prefLabel "ماسک"@fa, "Mask"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0002995>
  skos:prefLabel "Zone melting recrystallization"@en, "بازبلورش ذوب منطقه‌ای"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0014388>
  skos:prefLabel "Oxidation"@en, "اکسایش"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001670>
  skos:prefLabel "Etching"@en, "سونش"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0008856>
  skos:prefLabel "Lithography"@en, "سنگ‌نگاری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0005532>
  skos:prefLabel "Monolithic integrated circuit"@en, "مدار مجتمع یکپارچه"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001555>
  skos:prefLabel "Clean room"@en, "اتاق تمیز"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0003518>
  skos:prefLabel "Microassembling"@en, "ریزهمگذاری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001562>
  skos:prefLabel "Semiconductor growth"@en, "رشد نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001506>
  skos:prefLabel "Focused ion beam technology"@en, "فناوری باریکه یونی کانونی‌شده"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp000395>
  skos:prefLabel "Vacuum microelectronics"@en, "ریزالکترونیک خلاء"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0004611>
  skos:prefLabel "Passivation"@en, "اثرناپذیرسازی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0010197>
  skos:prefLabel "Laser beam annealing"@en, "تابکاری باریکه لیزری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0009148>
  skos:prefLabel "Ion implantation"@en, "کاشت یون"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0003811>
  skos:prefLabel "Lead bonding"@en, "پیوندزنی سربی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0008030>
  skos:prefLabel "Semiconductor materials"@en, "مواد نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0011321>
  skos:prefLabel "Encapsulation"@en, "پوشینه‌دارسازی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001561>
  skos:prefLabel "Semiconductor doping"@en, "دوپه‌کردن نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0010355>
  skos:prefLabel "Getter"@en, "گازربا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001574>
  skos:prefLabel "Technology"@en, "فناوری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001559>
  skos:prefLabel "Semiconductor device metallization"@en, "فلزپوشانی افزار نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0004723>
  skos:prefLabel "Electronics packaging"@en, "بسته‌بندی الکترونیکی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0002645>
  skos:prefLabel "Semiconductor device"@en, "افزار نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001681>
  skos:prefLabel "Surface cleaning"@en, "تمیزکاری سطح"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0009981>
  skos:prefLabel "Semiconductor industry"@en, "صنعت نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0009247>
  skos:prefLabel "Simox"@en, "سیماکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0010196>
  skos:prefLabel "Incoherent light annealing"@en, "تابکاری نور ناهمدوس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0006589>
  skos:prefLabel "Micromechanical device"@en, "افزار ریزمکانیکی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001673>
  skos:prefLabel "Chemical mechanical polishing"@en, "پرداخت مکانیکی شیمیایی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001560>
  skos:prefLabel "Semiconductor device packaging"@en, "بسته‌بندی افزار نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0003529>
  skos:prefLabel "Semiconductor device manufacture"@en, "تولید افزار نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0008853>
  skos:prefLabel "Photolithography"@en, "سنگ‌نگاری نوری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001558>
  skos:prefLabel "Semiconductor device measurement"@en, "اندازه‌گیری افزار نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0003385>
  skos:prefLabel "Crystal purification"@en, "خالص‌سازی بلور"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0010195>
  skos:prefLabel "Electron beam annealing"@en, "تاب‌کاری باریکه الکترون"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .

<http://www.irandoc.acir/onto/irandoc/insp0001565>
  skos:narrower <http://www.irandoc.acir/onto/irandoc/insp0001562>, <http://www.irandoc.acir/onto/irandoc/insp0001561>, <http://www.irandoc.acir/onto/irandoc/insp0001556>, <http://www.irandoc.acir/onto/irandoc/insp0001564>, <http://www.irandoc.acir/onto/irandoc/insp0001563>, <http://www.irandoc.acir/onto/irandoc/insp0001557>, <http://www.irandoc.acir/onto/irandoc/insp0001559>, <http://www.irandoc.acir/onto/irandoc/insp0001558>, <http://www.irandoc.acir/onto/irandoc/insp0001560>, <http://www.irandoc.acir/onto/irandoc/insp0001555> ;
  skos:altLabel "فراوری نیم‌رسانا"@fa, "semiconductor processing"@en ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008852>, <http://www.irandoc.acir/onto/irandoc/insp0008109>, <http://www.irandoc.acir/onto/irandoc/insp0001506>, <http://www.irandoc.acir/onto/irandoc/insp0003529>, <http://www.irandoc.acir/onto/irandoc/insp0003811>, <http://www.irandoc.acir/onto/irandoc/insp0009148>, <http://www.irandoc.acir/onto/irandoc/insp0013322>, <http://www.irandoc.acir/onto/irandoc/insp0003876>, <http://www.irandoc.acir/onto/irandoc/insp0004723>, <http://www.irandoc.acir/onto/irandoc/insp0010195>, <http://www.irandoc.acir/onto/irandoc/insp0014388>, <http://www.irandoc.acir/onto/irandoc/insp0003518>, <http://www.irandoc.acir/onto/irandoc/insp0009247>, <http://www.irandoc.acir/onto/irandoc/insp0002995>, <http://www.irandoc.acir/onto/irandoc/insp0002891>, <http://www.irandoc.acir/onto/irandoc/insp0001673>, <http://www.irandoc.acir/onto/irandoc/insp0010211>, <http://www.irandoc.acir/onto/irandoc/insp0006604>, <http://www.irandoc.acir/onto/irandoc/insp0008030>, <http://www.irandoc.acir/onto/irandoc/insp0003385>, <http://www.irandoc.acir/onto/irandoc/insp0001681>, <http://www.irandoc.acir/onto/irandoc/insp0006589>, <http://www.irandoc.acir/onto/irandoc/insp0002982>, <http://www.irandoc.acir/onto/irandoc/insp0002889>, <http://www.irandoc.acir/onto/irandoc/insp0005532>, <http://www.irandoc.acir/onto/irandoc/insp0008844>, <http://www.irandoc.acir/onto/irandoc/insp0002645>, <http://www.irandoc.acir/onto/irandoc/insp0008856>, <http://www.irandoc.acir/onto/irandoc/insp0001670>, <http://www.irandoc.acir/onto/irandoc/insp0003527>, <http://www.irandoc.acir/onto/irandoc/insp0010196>, <http://www.irandoc.acir/onto/irandoc/insp0014269>, <http://www.irandoc.acir/onto/irandoc/insp0008853>, <http://www.irandoc.acir/onto/irandoc/insp0014384>, <http://www.irandoc.acir/onto/irandoc/insp0010197>, <http://www.irandoc.acir/onto/irandoc/insp0010199>, <http://www.irandoc.acir/onto/irandoc/insp0004611>, <http://www.irandoc.acir/onto/irandoc/insp0002890>, <http://www.irandoc.acir/onto/irandoc/insp0010355>, <http://www.irandoc.acir/onto/irandoc/insp000395>, <http://www.irandoc.acir/onto/irandoc/insp0011321>, <http://www.irandoc.acir/onto/irandoc/insp0009981>, <http://www.irandoc.acir/onto/irandoc/insp0009152>, <http://www.irandoc.acir/onto/irandoc/insp0001529> ;
  a skos:Concept, <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept> ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0001574> ;
  skos:prefLabel "Semiconductor technology"@en, "فناوری نیم‌رسانا"@fa .

<http://www.irandoc.acir/onto/irandoc/insp0003876>
  skos:prefLabel "Micromachining"@en, "ریزماشین‌کاری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0001565> .