@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

<http://www.irandoc.acir/onto/irandoc/insp0008854>
  skos:prefLabel "Proximity effect (lithography)"@en, "اثر مجاورت (سنگ‌نگاری)"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0008109>
  skos:prefLabel "ماسک"@fa, "Mask"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0002890>
  skos:prefLabel "Photoresist"@en, "لایه مقاوم به نور"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0001565>
  skos:prefLabel "Semiconductor technology"@en, "فناوری نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0008852>
  skos:prefLabel "X-ray lithography"@en, "سنگ‌نگاری پرتو ایکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0008107>
  skos:prefLabel "Reticles"@en, "رتیکول"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0008849>
  skos:prefLabel "Ultraviolet lithography"@en, "سنگ‌نگاری فرابنفش"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0001529>
  skos:prefLabel "Integrated circuit technology"@en, "فناوری مدار مجتمع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0008853>
  skos:narrower <http://www.irandoc.acir/onto/irandoc/insp0002890>, <http://www.irandoc.acir/onto/irandoc/insp0008847>, <http://www.irandoc.acir/onto/irandoc/insp0008852>, <http://www.irandoc.acir/onto/irandoc/insp0008849> ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008107>, <http://www.irandoc.acir/onto/irandoc/insp0008854>, <http://www.irandoc.acir/onto/irandoc/insp0008109>, <http://www.irandoc.acir/onto/irandoc/insp0008106>, <http://www.irandoc.acir/onto/irandoc/insp0001565>, <http://www.irandoc.acir/onto/irandoc/insp0005652>, <http://www.irandoc.acir/onto/irandoc/insp0004460>, <http://www.irandoc.acir/onto/irandoc/insp0003528>, <http://www.irandoc.acir/onto/irandoc/insp0001529> ;
  a skos:Concept, <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept> ;
  skos:prefLabel "سنگ‌نگاری نوری"@fa, "Photolithography"@en ;
  skos:altLabel "optical lithography"@en ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0008856> .

<http://www.irandoc.acir/onto/irandoc/insp0008847>
  skos:prefLabel "Immersion lithography"@en, "سنگ‌نگاری غوطه‌‌وری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0005652>
  skos:prefLabel "Printed circuit"@en, "مدار چاپی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0008856>
  skos:prefLabel "Lithography"@en, "سنگ‌نگاری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0008106>
  skos:prefLabel "Phase shifting mask"@en, "ماسک تغییرکننده فاز"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0004460>
  skos:prefLabel "Photographic application"@en, "کاربرد عکاسی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

<http://www.irandoc.acir/onto/irandoc/insp0003528>
  skos:prefLabel "Integrated circuit manufacture"@en, "ساخت مدار یکپارچه"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/insp0008853> .

